Sensors | Free Full-Text | Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists
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Why a Pressure Sensor's Packaging Matters
MEMS pressure sensors feature fast response, high resolution, long-term stability
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Figure 2 from Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists | Semantic Scholar
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